Direct writing of sub-wavelength ripples on silicon using femtosecond laser at high repetition rate
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- 作者：Changxin Xie ; Xiaohong Li ; lixiaohong@swust.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Kaijun Liu ; Min Zhu ; Rong Qiu ; Qiang Zhou
- 关键词：Laser-induced periodic surface structures (LIPSSs) ; Near sub-wavelength ripples ; Deep sub-wavelength ripples ; Femtosecond laser pulses ; Monocrystalline silicon
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：1 January 2016
- 年：2016
- 卷：360
- 期：part_PB
- 页码：896-903
- 全文大小：2458 K
文摘
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The NSRs and DSRs are obtained on silicon surface.
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With increasing direct writing speed, the NSRs suddenly changes and becomes the DSRs.
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We develop a Sipe–Drude interference theory by considering the thermal excitation.