The Tynode: A new vacuum electron multiplier

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• 作者：Harry van der Graaf^a ; ^b ; ^{vdgraaf@nikhef.nl} ; Hassan Akhtar^a ; Neil Budko^a ; Hong Wah Chan^a ; Cornelis W. Hagen^a ; Conny C.T. Hansson^a ; ^b ; Gert Nü ; tzel^d ; Serge D. Pinto^d ; Violeta Prodanović^a ; Behrouz Raftari^a ; Pasqualina M. Sarro^a ; John Sinsheimer^c ; John Smedley^c ; Shuxia Tao^e ; Anne M.M.G. Theulings^a ; ^b ; Kees Vuik^a
• 关键词：ALD ; atomic layer deposition ; BSE ; back scatter electrons ; CBM ; conduction band minimum ; CMOS ; complementary metal oxide semiconductor ; DFC ; Dual Faraday Cup ; EA ; electron affinity ; FSE ; forward scattered electrons ; GEANT ; Geometry and Tracking ; MEMS ; Micro Electronic Mechanical Systems ; NEA ; negative electron affinity ; PE ; primary electron ; SEE ; secondary electron emission ; SEY ; secondary electron yield ; RSE ; reflective secondary electrons ; RSEY ; reflective secondary electron yield ; SEM ; scanni
• 刊名：Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
• 出版年：2017
• 出版时间：1 March 2017
• 年：2017
• 卷：847
• 期：Complete
• 页码：148-161
• 全文大小：2641 K
• 卷排序：847

文摘

By placing, in vacuum, a stack of transmission dynodes (tynodes) on top of a CMOS pixel chip, a single free electron detector could be made with outstanding performance in terms of spatial and time resolution. The essential object is the tynode: an ultra thin membrane, which emits, at the impact of an energetic electron on one side, a multiple of electrons at the other side. The electron yields of tynodes have been calculated by means of GEANT-4 Monte Carlo simulations, applying special low-energy extensions. The results are in line with another simulation based on a continuous charge-diffusion model.By means of Micro Electro Mechanical System (MEMS) technology, tynodes and test samples have been realized. The secondary electron yield of several samples has been measured in three different setups. Finally, several possibilities to improve the yield are presented.