Site-selectively Grown p-type Ge NWs as a Gas Sensor

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• 关键词：Nanowires ; Germanium ; Microhotplate ; Humidity sensor
• 刊名：Procedia Engineering
• 出版年：2016
• 出版时间：2016
• 年：2016
• 卷：168
• 期：Complete
• 页码：1056-1060
• 全文大小：176 K
• 卷排序：168

文摘

Ge NWs have been selectively grown directly on top of the suspended microhotplates, with heater and interdigitated electrodes, via Au catalyzed Vapor Liquid Solid (VLS) mechanism through a low-power consumption CVD-like process. The so-fabricated devices, with a p-type semiconductors behavior, have been characterized towards water vapor in synthetic air, keeping the temperature at 100°C in order to achieve a stable oxide. The results show reproducible responses towards H2O.