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Effect of oxygen pressure on preferential orientation, microstructure and functional properties of Bi1.5MgNb1.5O7 thin films prepared by pulsed laser deposition
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文摘

The BMN films were prepared by PLD at different oxygen pressure.

The films deposited at 10 Pa have a medium tunability of 22.1%.

The films deposited at 10 Pa have the minimum degree of preferred orientation.

Oxygen pressure dependence of preferred orientation was discussed.

Preferred orientation dependence of permittivity and tangent loss was discussed.

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