Fabrication of large-scale α-Si₃N₄ nanotubes on Si(111) by hot-wall chemical-vapor-deposition with the assistance of Ga₂O₃

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• 作者：Wei ; Qinqin ; Xue ; Chengshan ; Sun ; Zhencui ; Zhuang ; Huizhao ; Cao ; Wentian ; Wang ; Shuyun ; Dong ; Zhihua
• 关键词：71.55.Eq ; 81.15.-z ; 68.60.-p ; Hot-wall CVD ; α ; -Si₃N₄ ; Nanotubes ; Nano-material
• 刊名：Applied Surface Science
• 出版年：2004
• 出版时间：May 15, 2004
• 年：2004
• 卷：229
• 期：1-4
• 页码：9-12
• 全文大小：139 K

文摘

Large-scale α-Si₃N₄ nanotubes were synthesized on Si(111) by hot-wall chemical-vapor-deposition (CVD) with the assistance of Ga₂O₃. The cylindrical structures were as long as 30um with the inside diameters ranging between 20 and 60nm and the outside diameters ranging between 40 and 100nm. Scanning electron microscope (SEM), X-ray diffraction (XRD), transmission electron microscope (TEM) and high-resolution TEM (HRTEM) were used to characterize the size, composition and the structure of the samples.