Synthesize ZnO nanoparticle thin film on p-Si substrate using RF sputtering method. I–V and C–V characteristics of Si/ZnO heterojunction diode are studied. High temperature performance is analyzed accounting barrier height inhomogeneities. Gaussian distribution of BH inhomogeneities is considered to modify Richardson plot. Modified R constant is 33.06 Acm−2K−2, i.e. nearer to theoretical value 32 Acm−2K−2.