Novel micro-pneumatic actuator for MEMS

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• 作者：B&uuml ; tefisch ; Sebastian ; Seidemann ; Volker ; B&uuml ; ttgenbach ; Stephanus
• 关键词：Pneumatic actuator ; Micro-gripper ; SU8
• 刊名：Sensors and Actuators A: Physical
• 出版年：2002
• 出版时间：April 1, 2002
• 年：2002
• 卷：97-98
• 期：Complete
• 页码：638-645
• 全文大小：510 K

文摘

This paper presents a micro-pneumatic actuator utilizing a new actuation principle for micro-mechanical systems. As a first application, a micro-gripper driven by two bellow-type micro-pneumatic actuators, is described. The basic structures of the micro-pneumatic actuator and the micro-gripper are fabricated by silicon dry etching in a single etching step. The device consists of a Pyrex–silicon–Pyrex sandwich structure which was assembled by anodic bonding. Alternatively, an SU8 UV-depth lithography process was used to realize the pneumatically driven micro-gripper.