Effects of hydrogen incorporation on structural, optical and electrical properties of germanium carbon films prepared with RF magnetron co-sputtering

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• 作者：Yangping Li ; ^{liyp@nwpu.edu.cn} ; Chenxi Li ; Zhuo Xu ; Zhengtang Liu
• 关键词：Germanium carbon ; Magnetron co-sputtering ; Structural disorder degree ; Optical properties ; Electrical resistivity
• 刊名：Journal of Alloys and Compounds
• 出版年：2017
• 出版时间：15 February 2017
• 年：2017
• 卷：694
• 期：Complete
• 页码：647-652
• 全文大小：1142 K
• 卷排序：694

文摘

a-Ge1-xCx:H films were deposited by using magnetron co-sputtering. Observed incorporation of H could promote the film's structural order degree. Found the formation of GeC bonds could be improved by incorporation of H. Revealed chemical bonds and structural order affected the film's properties.