Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering
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- 作者：Olaf Zywitzki ; olaf.zywitzki@fep.fraunhofer.de ; Thomas Modes ; Stephan Barth ; Hagen Bartzsch ; Peter Frach
- 关键词：Aluminum scandium nitride films ; Pulse magnetron sputtering ; Structure ; Piezoelectric properties ; Young's modulus
- 刊名：Surface and Coatings Technology
- 出版年：2017
- 出版时间：15 January 2017
- 年：2017
- 卷：309
- 期：Complete
- 页码：417-422
- 全文大小：1613 K
- 卷排序：309
文摘
AlxSc1-xN films with high piezoelectric coefficient are deposited by pulse magnetron sputtering without substrate heating For 35 to 43% scandium content a relative broad range of piezoelectric coefficients could be detected Reduced elastic stiffness and higher polarity of the distorted wurtzite structure A substrate temperature below 300 °C seems to beneficial for good piezoelectric properties