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Effects of annealing temperatures on the morphological, mechanical, surface chemical bonding, and solar selectivity properties of sputtered TiAlSiN thin films
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TiAlSiN sputtered coatings were characterized for solar selective applications.

In situ synchrotron radiation XRD were studies show the occurrence of multiple stable phases.

A high selectivity of 24.63 has been achieved for the coatings annealed at 700 °C.

Existence of XRD phases were also confirmed by XPS measurements.

At high temperature annealing the mechanical properties of films were governed by the utmost surfaces of the films.

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