Effect of bias voltage on TiAlSiN nanocomposite coatings deposited by HiPIMS
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- 作者：Quansheng Ma ; Liuhe Li ; liliuhe@buaa.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Ye Xu ; ye.xu@buaa.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Jiabin Gu ; Lei Wang ; Yi Xu
- 关键词：TiAlSiN ; HiPIMS ; Bias voltage ; Microstructure ; Mechanical properties
- 刊名：Applied Surface Science
- 出版年：2017
- 出版时间：15 January 2017
- 年：2017
- 卷：392
- 期：Complete
- 页码：826-833
- 全文大小：2708 K
文摘
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HiPIMS-deposited TiAlSiN coatings show obvious improvements compared with DCMS.
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The effects of bias voltage on coatings properties have evident regularity.
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A coating with high hardness, low roughness and small grain size was attained.
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An increasing plasma discharge current was detected with increasing the bias voltage.
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