Study on the preparation of boron-rich film by magnetron sputtering in oxygen atmosphere
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- 作者：Zhangmin Pan ; Yiming Yang ; Jian Huang ; Bing Ren ; Hongze Yu ; Run Xu ; Huanhuan Ji ; Lin Wang ; Linjun Wang ; ljwang@shu.edu.cn" class="auth_mail" title="E-mail the corresponding author
- 关键词：Boron films ; Magnetron sputtering ; X-ray photoelectron spectroscopy
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：1 December 2016
- 年：2016
- 卷：388
- 期：part_PA
- 页码：392-395
- 全文大小：856 K
文摘
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Boron (10B) oxide films were successfully grown using RF magnetron sputtering.
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Effects of oxygen partial pressure on the property of the films were studied.
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Substrates were covered with B-rich film and film surface was covered with B2O3.
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The growth mechanism of films in oxygen atmosphere was analyzed using XPS.