Fabrication of continuous relief micro-optic elements using real-time maskless lithography technique based on DMD

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• 作者：Kejun Zhong ; Yiqing Gao ; Feng Li ; Ningning Luo ; Weiwei Zhang
• 关键词：Continuous relief micro-lens ; Aspheric and spheric micro-lens array ; Maskless lithography
• 刊名：Optics and Laser Technology
• 出版年：March, 2014
• 年：2014
• 卷：56
• 期：Complete
• 页码：367-371
• 全文大小：2614 K

文摘

A novel method is proposed to fabricate continuous relief micro-optic elements using real-time maskless lithography technique based on digital mirror device (DMD). To evaluate the method, aspheric and spheric micro-lens array was fabricated by following the proposed principle. Firstly distribution of the required exposure dose of lens array was obtained and sliced into a number of contours of equal proportions. Then the contour planes instead of virtual masks were converted into binary image. On the lithography system, the dose accumulated over multiple exposures and the required exposure dose profiles were reconstructed. Finally in the photoresist layer, virtual profiles of lens array were formed, consistent with the original designed elements. The method is feasible and reliable for the fabrication of arbitrary continuous relief micro-optic elements.