Weak scratch detection and defect classification methods for a large-aperture optical element

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• 作者：Xian Tao ; De Xu ; Zheng-Tao Zhang ; ^{zhengtao.zhang@ia.ac.cn} ; Feng Zhang ; Xi-Long Liu ; Da-Peng Zhang
• 关键词：Optical inspection ; Weak scratches ; Surface defects classification ; Large-aperture optical element
• 刊名：Optics Communications
• 出版年：2017
• 出版时间：15 March 2017
• 年：2017
• 卷：387
• 期：Complete
• 页码：390-400
• 全文大小：1502 K
• 卷排序：387

文摘

We propose a coarse-to-fine detection strategy of weak scratch in the complicated dark-field images of the large-aperture optical element. The coarse detection method is based on the bionic vision which is applicable to various types of linear defect detection. For the classification of defect and pollutants, a classification method based on GIST features is proposed.