The microstructure and mechanical properties of multilayer diamond-like carbon films with different modulation ratios

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• 作者：Zhaoying Xu ; Y.J. Zheng ; F. Jiang ; Y.X. Leng ; ^{yxleng@263.net} ; Hong Sun ; Nan Huang
• 关键词：Modulation ratio ; Ti&ndash ; 6Al&ndash ; 4V alloy ; Microstructure ; Residual stress ; Mechanical properties ; Multilayer diamond-like carbon films
• 刊名：Applied Surface Science
• 出版年：2013
• 出版时间：1 January, 2013
• 年：2013
• 卷：264
• 期：Complete
• 页码：207-212
• 全文大小：836 K

文摘

The multilayer DLC films consisting of sp²-rich DLC layers (soft DLC) and sp³-rich DLC layers (hard DLC) with different modulation ratios (thickness ratio of the hard DLC to soft DLC) ranging from 2:1, 1:1 to 1:2 had been deposited on Si (1 0 0) wafer and Ti-6Al-4V alloy substrates by filtered cathodic vacuum arc (FCVA) deposition. The effect of modulation ratio on the microstructure and properties of the multilayer DLC films including sp³ content, residual stress, mechanical properties, adhesion strength and wear resistance were studied by Raman spectroscopy, profilometry technique, nanoindenter, Vickers indentation test, scanning electron microscopy (SEM) and ball-on-disc reciprocating friction test. The results showed that the sp³ content and the hardness of the multilayer DLC films decreased with modulation ratios decreasing. The stress of the multilayer DLC films could be effectively reduced and the stress decreased with the modulation ratio decreasing. The multilayer DLC film with modulation ratio of 1:1 had the best wear resistance due to a balance between hardness and residual stress.