Room-temperature deposition of transparent conducting Al-doped ZnO films by RF magnetron sputtering method

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• 作者：Weifeng Yang ; Zhuguang Liu ; Dong-Liang Peng ; Feng Zhang ; Huolin Huang ; Yannan Xie ; Zhengyun Wu
• 关键词：AZO film ; Transparent conductive oxide ; RF magnetron sputtering ; Low temperature deposition
• 刊名：Applied Surface Science
• 出版年：2009
• 出版时间：15 March 2009
• 年：2009
• 卷：255
• 期：11
• 页码：5669-5673
• 全文大小：1100 K

文摘

Transparent conductive Al-doped zinc oxide (AZO) films with highly (0 0 2)-preferred orientation were deposited on quartz substrates at room temperature by RF magnetron sputtering. Optimization of deposition parameters was based on RF power, Ar pressure in the vacuum chamber, and distance between the target and substrate. The structural, electrical, and optical properties of the AZO thin films were investigated by X-ray diffraction, Hall measurement, and optical transmission spectroscopy. The 250 nm thickness AZO films with an electrical resistivity as low as 4.62 × 10⁻⁴ Ω cm and an average optical transmission of 93.7 % in the visible range were obtained at RF power of 300 W, Ar flow rate of 30 sccm, and target distance of 7 cm. The optical bandgap depends on the deposition condition, and was in the range of 3.75–3.86 eV. These results make the possibility for light emitting diodes (LEDs) and solar cells with AZO films as transparent electrodes, especially using lift-off process to achieve the transparent electrode pattern transfer.