文摘
The diopside ceramics, CaMg1?xZnxSi2O6 (x=0-0.3), were synthesized via the solid-state reaction method. Zn2+ substitution for Mg2+ can markedly lower the densification temperature and improve the microwave dielectric properties of CaMgSi2O6 ceramics. For x=0.1, CaMg0.9Zn0.1Si2O6 ceramics, can be sintered at 1200 ¡ãC and exhibit good microwave dielectric properties of ¦År=7.88, Qf=76,100 GHz and ¦Óf=?22.5 ppm/¡ãC. LiF addition was proved to be effective to lower the sintering temperature to ¡«900 ¡ãC without degrading the dielectric properties apparently. The CaMg0.9Zn0.1Si2O6 ceramics doped with 0.6 wt % LiF can be sintered in the temperature range of 900-975 ¡ãC and have excellent dielectric properties of ¦År¡«7.7, Qf¡«70,000 GHz and ¦Óf¡«?25 ppm/¡ãC. With low sintering temperature and good dielectric properties, these LiF-doped diopside ceramics are promising materials for LTCC integration applications.