AlGaN/GaN HEMTs with 90 nm gate-length are fabricated in this paper. A small-signal model of GaN HEMTs considering mesa edge capacitances is provided. The maximum fT and fmax of the devices are 84.8 G Hz and 128.2 G Hz, respectively. The gate capacitances of AlGaN/GaN HEMTs with different gate widths are extracted.