Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition

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• 作者：Fangwei Wang^a ; ^b ; Lei Chen^a ; Yujin Wang^a ; ^{wangyujin_hit@163.com} ; Mianyi Yao^a ; Sue Hao^b ; Jiahu Ouyang^a ; Zhenkun Huang^c
• 关键词：Chemical vapor deposition ; Composite coating ; Morphology ; Mechanism
• 刊名：Ceramics International
• 出版年：2017
• 出版时间：1 February 2017
• 年：2017
• 卷：43
• 期：2
• 页码：2853-2858
• 全文大小：1619 K
• 卷排序：43

文摘

Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1 h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400 °C for the 4 h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail.