Investigation of filtered vacuum arc plasma application for TiAlN and TiSiB coatings deposition using ion beam and plasma material processing

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• 作者：Igor B. Stepanov ; ^{stepanovib@tpu.ru" class="auth_mail" title="E-mail the corresponding author} ; Alexander I. Ryabchikov ; Peter S. Ananin ; Anna I. Bumagina ; Alexey E. Shevelev ; Ivan A. Shulepov ; Denis O. Sivin
• 关键词：Plasma filter ; Vacuum arc plasma ; Macroparticle ; High-frequency short-pulse negative bias ; Ion implantation ; Coating
• 刊名：Surface and Coatings Technology
• 出版年：2016
• 出版时间：25 June 2016
• 年：2016
• 卷：296
• 期：Complete
• 页码：20-25
• 全文大小：420 K

文摘

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d="p0005">New modification of vacuum arc plasma macroparticle filter is described.

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d="p0010">High-frequency short-pulsed plasma immersion ion treatment is applied.

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d="p0015">Several different plasma and ion sources with macroparticle filtering were used.

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d="p0020">TiAlN, TiSiB macroparticle free coatings formation is investigated.

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