Proton-conductive inorganic-organic hybrid films, which can be used as an electrolytefor polymer electrolyte-type fuel cells at temperatures higher than 100
C with lowhumidification, have been prepared from 3-glycidoxypropyltrimethoxysilane, tetramethoxysilane, and orthophosphoric acid by the sol-gel method. Self-supporting, flexible, andbrownish transparent films with a thickness of about 200 to 300
m were obtained.Differential thermal analysis and thermogravimetric measurements revealed that the filmswere stable up to about 200
C. The ionic conductivity of the films increased with an increasein the content of phosphoric acid in the films. The films with a molar ratio of P/Si = 1.5 kepta high conductivity of about 7 × 10
-4 S cm
-1 even after holding for 6 h under 0.7% relativehumidity at 130
C.