High K Nanophase Zinc Oxide on Biomimetic Silicon Nanotip Array as Supercapacitors

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• 作者：Hsieh-Cheng Han ; Cheong-Wei Chong ; Sheng-Bo Wang ; Dawei Heh ; Chi-Ang Tseng ; Yi-Fan Huang ; Surojit Chattopadhyay ; Kuei-Hsien Chen ; Chi-Feng Lin ; Jiun-Haw Lee ; Li-Chyong Chen
• 刊名：Nano Letters
• 出版年：2013
• 出版时间：April 10, 2013
• 年：2013
• 卷：13
• 期：4
• 页码：1422-1428
• 全文大小：444K
• 年卷期：v.13,no.4(April 10, 2013)
• ISSN：1530-6992

文摘

A 3D trenched-structure metal鈥搃nsulator鈥搈etal (MIM) nanocapacitor array with an ultrahigh equivalent planar capacitance (EPC) of 300 渭F cm^鈥? is demonstrated. Zinc oxide (ZnO) and aluminum oxide (Al₂O₃) bilayer dielectric is deposited on 1 渭m high biomimetic silicon nanotip (SiNT) substrate using the atomic layer deposition method. The large EPC is achieved by utilizing the large surface area of the densely packed SiNT (5 脳 10¹⁰ cm^鈥?) coated conformally with an ultrahigh dielectric constant of ZnO. The EPC value is 30 times higher than those previously reported in metal鈥搃nsulator鈥搈etal or metal鈥搃nsulator鈥搒emiconductor nanocapacitors using similar porosity dimensions of the support materials.

Keywords:

Zinc oxide; nanophase; silicon nanotip array; supercapacitors; equivalent planar capacitance