Monolithic Integration of a Silicon Nanowire Field-Effect Transistors Array on a Complementary Metal-Oxide Semiconductor Chip for Biochemical Sensor Applications

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• 作者：Paolo Livi ; Moria Kwiat ; Amir Shadmani ; Alexander Pevzner ; Giulio Navarra ; J枚rg Rothe ; Alexander Stettler ; Yihui Chen ; Fernando Patolsky ; Andreas Hierlemann
• 刊名：Analytical Chemistry
• 出版年：2015
• 出版时间：October 6, 2015
• 年：2015
• 卷：87
• 期：19
• 页码：9982-9990
• 全文大小：497K
• ISSN：1520-6882

文摘

We present a monolithic complementary metal-oxide semiconductor (CMOS)-based sensor system comprising an array of silicon nanowire field-effect transistors (FETs) and the signal-conditioning circuitry on the same chip. The silicon nanowires were fabricated by chemical vapor deposition methods and then transferred to the CMOS chip, where Ti/Pd/Ti contacts had been patterned via e-beam lithography. The on-chip circuitry measures the current flowing through each nanowire FET upon applying a constant source-drain voltage. The analog signal is digitized on chip and then transmitted to a receiving unit. The system has been successfully fabricated and tested by acquiring I鈥?i>V curves of the bare nanowire-based FETs. Furthermore, the sensing capabilities of the complete system have been demonstrated by recording current changes upon nanowire exposure to solutions of different pHs, as well as by detecting different concentrations of Troponin T biomarkers (cTnT) through antibody-functionalized nanowire FETs.