Electron Thermal Microscopy

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• 作者：Todd Brintlinger ; Yi Qi ; Kamal H. Baloch ; David Goldhaber-Gordon ; John Cumings
• 刊名：Nano Letters
• 出版年：2008
• 出版时间：February 2008
• 年：2008
• 卷：8
• 期：2
• 页码：582 - 585
• 全文大小：322K
• 年卷期：v.8,no.2(February 2008)
• ISSN：1530-6992

文摘

We present real-time, nanoscale temperature mapping using a transmission electron microscope and standard phase transitions in metalislands. Islands are deposited on the reverse side of commercially available silicon nitride membranes, while local thermal gradients areproduced by Joule heating in a thin wire on the front side of the membrane. Change in contrast due to the liquid-solid transition in theislands allows the mapping of absolute temperature, as above or below the transition temperature, over the entire field-of-view. Experimentsdemonstrate nanoscale (<100 nm) resolution and video-rate (>30 thermal-images per second) speed, supported by combined electrical andthermal modeling. This provides a generic and adaptable platform for nanoscale thermal characterization independent of strong probe couplingand optical effects.