Effective Method for Micro-Patterning Arene-Terminated Monolayers on a Si(111) Electrode

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• 作者：Yoshinori Yamanoi ; Tetsuhiro Kobayashi ; Hiroaki Maeda ; Mariko Miyachi ; Masato Ara ; Hirokazu Tada ; Hiroshi Nishihara
• 刊名：Langmuir
• 出版年：2016
• 出版时间：July 12, 2016
• 年：2016
• 卷：32
• 期：27
• 页码：6825-6829
• 全文大小：315K
• 年卷期：0
• ISSN：1520-5827

文摘

Microstructured electrodes are significant to modern electrochemistry. A representative aromatic group, 4-ferrocenylphenyl one, was covalently bound to a micropatterned silicon electrode via the arylation of a hydrogen-terminated silicon(111) surface formed selectively on a Si wafer. Starting from a silicon(100)-on-insulator (SOI) wafer, the aromatic monolayer was attached sequentially by spin-coating a resist, electron beam lithography, Cr/Au deposition, lift-off, anisotropic etching with aqueous KOH solution, and Pd-catalyzed arylation. Cyclic voltammetry (CV) and X-ray photoelectron spectroscopy (XPS) are used to characterize the coupling reaction between 4-ferrocenyl group and silicon substrate, and to confirm performance of the final modified microsized electrode. These data show that this synthetic protocol gives chemically well-defined and robust functionalized monolayers on a silicon semiconducting surface with a small electrode.