Observing the Nucleation Phase of Atomic Layer Deposition In Situ

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• 作者：James F. Mack ; Philip B. Van Stockum ; Yonas T. Yemane ; Manca Logar ; Hitoshi Iwadate ; Fritz B. Prinz
• 刊名：Chemistry of Materials
• 出版年：2012
• 出版时间：November 27, 2012
• 年：2012
• 卷：24
• 期：22
• 页码：4357-4362
• 全文大小：699K
• 年卷期：v.24,no.22(November 27, 2012)
• ISSN：1520-5002

文摘

We present in situ topographical observations of film growth during the initial cycles of atomic layer deposition (ALD) using scanning tunneling microscopy (STM). We present cycle-by-cycle STM topographs of zinc sulfide films during ALD on Au(111) surfaces, tracking individual grains, 5 nm in diameter, as they grow over tens of cycles. We find that grain morphology is temperature-dependent and grain size increases with deposition temperature from 100 to 160 掳C.<br>

Keywords:

bs.acs.org/action/doSearch?action=search&searchText=atomic+layer+deposition&qsSearchArea=searchText">atomic layer deposition; bs.acs.org/action/doSearch?action=search&searchText=scanning+tunneling+microscopy&qsSearchArea=searchText">scanning tunneling microscopy; bs.acs.org/action/doSearch?action=search&searchText=zinc+sulfide&qsSearchArea=searchText">zinc sulfide; bs.acs.org/action/doSearch?action=search&searchText=nucleation&qsSearchArea=searchText">nucleation