Reuse of Semiconductor Wastewater Using Reverse Osmosis and Metal-Immobilized Catalyst-Based Advanced Oxidation Process

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• 作者：Jeongyun Choi ; Jinwook Chung
• 刊名：Industrial & Engineering Chemistry Research
• 出版年：2014
• 出版时间：July 9, 2014
• 年：2014
• 卷：53
• 期：27
• 页码：11167-11175
• 全文大小：466K
• ISSN：1520-5045

文摘

This report describes an efficient hybrid treatment process that recycles semiconductor wastewater by reverse osmosis (RO) and advanced oxidation process (AOP) with metal-immobilized catalysts based on activated carbon. High-loading organic wastewater was pretreated biologically using a membrane bioreactor, and the remaining organic compounds were filtered by RO and oxidized chemically by AOP. The recycling of the final effluent to ultrapure water (UPW) was evaluated using a pilot-scale UPW production system. AOP with a metal catalyst improved the oxidation of low-molecular-weight organic compounds, such as acetonitrile and acetaldehyde, in electronics wastewater. The pilot-scale RO and AOP with a metal catalyst were performed under optimal conditions and satisfied the water quality standards for UPW. We conclude that the proposed hybrid process is a powerful tool that can be used to recycle electronics wastewater and satisfy the water quality standards for UPW.