Deterministic Nucleation of InP on Metal Foils with the Thin-Film Vapor–Liquid–Solid Growth Mode
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- 作者：Rehan Kapadia ; Zhibin Yu ; Mark Hettick ; Jingsan Xu ; Maxwell S. Zheng ; Cheng-Ying Chen ; Arunima D. Balan ; Daryl C. Chrzan ; Ali Javey
- 刊名：Chemistry of Materials
- 出版年：2014
- 出版时间：February 11, 2014
- 年：2014
- 卷：26
- 期：3
- 页码：1340-1344
- 全文大小：345K
- ISSN：1520-5002
文摘
A method for growth of ultralarge grain (>100 渭m) semiconductor thin-films on nonepitaxial substrates was developed via the thin-film vapor鈥搇iquid鈥搒olid growth mode. The resulting polycrystalline films exhibit similar optoelectronic quality as their single-crystal counterparts. Here, deterministic control of nucleation sites is presented by substrate engineering, enabling user-tuned internuclei spacing of up to 1 mm. Besides examining the theory associated with the nucleation process, this work presents an important advance toward controlled growth of high quality semiconductor thin films with unprecedented grain sizes on nonepitaxial substrates.