Carbon Structures Grown by Direct Current Microplasma: Diamonds, Single-Wall Nanotubes, and Graphene

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• 作者：Francesco Ghezzi ; Gabriele Cacciamani ; Roberto Caniello ; Dana Cristina Toncu ; Federica Causa ; David Dellasega ; Valeria Russo ; Matteo Passoni
• 刊名：Journal of Physical Chemistry C
• 出版年：2014
• 出版时间：October 23, 2014
• 年：2014
• 卷：118
• 期：42
• 页码：24714-24722
• 全文大小：528K
• ISSN：1932-7455

文摘

Plasma assisted CVD is now an established technique for the growth of a variety of dielectrics and semiconductors. The versatility of an in-house developed direct-current (dc) microplasma deposition system is demonstrated here for the growth of a wide range of carbon-based materials. Diamond, nanodiamond, nanocrystalline graphite, single-wall carbon nanotubes, and few-layer graphene have been deposited using the same dc microplasma deposition system using 0.5% CH₄/H₂ gas feed, but changing only the substrate temperature (in the range 500鈥?150 掳C) and the total pressure (0.3鈥?00 Torr). The different structures have been characterized by scanning electron microscopy and micro-Raman spectroscopy. The experimental data have been interpreted from a thermodynamic point of view by applying a nonequilibrium nondissipative model. Nonequilibrium phase diagrams are presented and compared to the experimental data to provide a wide-ranging interpretation scenario.