Atomic Layer Deposition of Lithium Tantalate Solid-State Electrolytes

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• 作者：Jian Liu ; Mohammad N. Banis ; Xifei Li ; Andrew Lushington ; Mei Cai ; Ruying Li ; Tsun-Kong Sham ; Xueliang Sun
• 刊名：Journal of Physical Chemistry C
• 出版年：2013
• 出版时间：October 3, 2013
• 年：2013
• 卷：117
• 期：39
• 页码：20260-20267
• 全文大小：450K
• 年卷期：v.117,no.39(October 3, 2013)
• ISSN：1932-7455

文摘

3D all-solid-state microbatteries are promising onboard power systems for autonomous devices. The fabrication of 3D microbatteries needs deposition of active materials, especially solid-state electrolytes, as conformal and pinhole free thin films in 3D architectures, which has proven very difficult for conventional deposition techniques, such as chemical vapor deposition and physical vapor deposition. Herein, we report an alternative technique, atomic layer deposition (ALD), for achieving ideal solid-state electrolyte thin films for 3D microbatteries. Lithium tantalate solid-state electrolytes, with well-controlled film composition and film thickness, were grown by ALD at 225 掳C using subcycle combination of 1 脳 Li₂O + n 脳 Ta₂O₅ (1 鈮?n 鈮?10). The film composition was tunable by varying Ta₂O₅ subcycles (n), whereas the film thickness displayed a linear relationship with ALD cycle number, due to the self-limiting nature of the ALD process. Furthermore, the lithium tantalate thin films showed excellent uniformity and conformity in 3D anodic aluminum oxide template. Moreover, impedance testing showed that the lithium tantalate thin film exhibited a lithium ion conductivity of 2 脳 10^鈥? S/cm at 299 K. The lithium tantalate thin films by ALD, featured with well-controlled film thickness and composition, excellent step coverage, and moderate ionic conductivity at room temperature, would be promising solid-state electrolytes for 3D microbatteries.