The detailed role of iron nanoparticles (NPs) involved with the formation of SiO<
SUB>2 nanotrenches is revealed. The physical movements of ironNPs,
such as levitation and adsorption, turn out to be responsible for the initiation of carbothermal reduction (C (carbon nanotube, s) +SiO
2(s)
SiO(g) + CO(g)), which re
sults in SiO
2 nanotrenches that are fully guided by carbon nanotubes. Under the chemical vapor depositioncondition with 0.1% of O
2 gas, iron NPs are liberally levitated from SiO
2/Si
substrate then adsorbed on the sidewalls of carbon nanotubes.Depending on the numbers of iron NPs attached to carbon nanotubes, two different types of nanotrenches are determined. When multiple ironNPs are assembled on carbon nanotubes and involved in carbothermal reduction, aligned nanohole type of nanotrenches is produced (TypeI). On the contrary, when single iron NPs initiate the carbothermal reduction, nanotrenches having smooth pathways and high shoulders arecommonly formed (Type II).