Epitaxy of Boron Phosphide on Aluminum Nitride(0001)/Sapphire Substrate

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• 作者：Balabalaji Padavala ; C. D. Frye ; Xuejing Wang ; Zihao Ding ; Ruifen Chen ; Michael Dudley ; Balaji Raghothamachar ; Peng Lu ; B. N. Flanders ; J. H. Edgar
• 刊名：Crystal Growth & Design
• 出版年：2016
• 出版时间：February 3, 2016
• 年：2016
• 卷：16
• 期：2
• 页码：981-987
• 全文大小：525K
• ISSN：1528-7505

文摘

The boron phosphide (BP) semiconductor has many remarkable features, including high thermal neutron capture cross section of the ¹⁰B isotope, making it attractive for neutron detection applications. Effective and efficient neutron detection require BP to also have high crystal quality with optimum electrical properties. Here, we present the heteroepitaxial growth of high quality BP films on a superior aluminum nitride(0001)/sapphire substrate by chemical vapor deposition. The effect of process variables on crystalline and morphological properties of BP was examined in detail. BP deposited at high temperatures and high reactant flow rate ratios produced films with increased grain size and improved crystalline orientation. Narrower full width at half-maximum values of BP Raman peaks (6.1 cm^–1) and ω rocking curves (352 arcsec) compared to values in the literature confirm the high crystalline quality of produced films. The films were n-type with the highest electron mobility of 37.8 cm²/V·s and lowest carrier concentration of 3.15 × 10¹⁸ cm^–3. Rotational twinning in BP due to degenerate epitaxy caused by 3-fold BP(111) on 6-fold AlN(0001) was confirmed by synchrotron white beam X-ray topography. This preliminary study showed that AlN is an excellent substrate for growing high quality BP epitaxial films with promising potential for further enhancement of BP properties.