文摘
A new substrate for surface-enhanced Raman spectroscopy has been developed in the form of siliconnanotips, by electron cyclotron resonance plasma chemical vapor deposition, with apex diameters of ~2nm, lengths of 1000 nm, and densities of 1011/cm2. The surface areas of the nanotips are ~150 m2cm-3,comparable with the best-quality porous silicon. Ion-beam-sputtered silver self-assembles on thesesubstrates as nanoparticles of 4-10 nm diameter and these metallic nanoparticles act as surfaceenhancement centers for Raman spectroscopy. Standard molecules such as Rhodamine 6G and trans-1,2-bis(4-pyridyl)ethylene (BPE) of concentrations in the range of 10-6 to 10-10 M have been studied onthese substrates and enhancements in the range of 106 to 108 were observed. These dry etched substrates,unlike those conventionally prepared by wet chemistry, are compatible with silicon device technologyand are remarkably stable and reproducible.