Dynamics of Wicking in Silicon Nanopillars Fabricated with Interference Lithography and Metal-Assisted Chemical Etching

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• 作者：Trong Thi Mai ; Chang Quan Lai ; H. Zheng ; Karthik Balasubramanian ; K. C. Leong ; P. S. Lee ; Chengkuo Lee ; W. K. Choi
• 刊名：Langmuir
• 出版年：2012
• 出版时间：August 7, 2012
• 年：2012
• 卷：28
• 期：31
• 页码：11465-11471
• 全文大小：409K
• 年卷期：v.28,no.31(August 7, 2012)
• ISSN：1520-5827

文摘

The capillary rise of liquid on a surface, or 鈥渨icking鈥? has potential applications in biological and industrial processes such as drug delivery, oil recovery, and integrated circuit chip cooling. This paper presents a theoretical study on the dynamics of wicking on silicon nanopillars based on a balance between the driving capillary forces and viscous dissipation forces. Our model predicts that the invasion of the liquid front follows a diffusion process and strongly depends on the structural geometry. The model is validated against experimental observations of wicking in silicon nanopillars with different heights synthesized by interference lithography and metal-assisted chemical etching techniques. Excellent agreement between theoretical and experimental results, from both our samples and data published in the literature, was achieved.