Structure and magneto-electrical properties of Fe-C films prepared by magnetron sputtering

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• 作者：Lei Ma (12)
  ZhongWu Liu (1)
  DeChang Zeng (1) medczeng@scut.edu.cn
  HongYa Yu (1)
  XiaPing Zhong (1)
  XiaoZhong Zhang (3)
• 关键词：carbon films &#8211 ; Fe ; doped DLC films &#8211 ; magnetoresistance &#8211 ; magnetron sputtering
• 刊名：SCIENCE CHINA Physics, Mechanics & Astronomy
• 出版年：2012
• 出版时间：September 2012
• 年：2012
• 卷：55
• 期：9
• 页码：1594-1598
• 全文大小：558.8 KB
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• 作者单位：1. School of Materials Science and Engineering, South China University of Technology, Guangzhou, 510640 China2. School of Materials Science and Engineering, Guilin University of Electronic Technology, Guilin, 541004 China3. Department of Materials Science and Engineering, Tsinghua University, Beijing, 100084 China
• ISSN：1869-1927

文摘

Fe-doped amorphous Fe _x C_1−x granular films were prepared on n-Si (100) substrates by d.c. magnetron sputtering. The structural properties of Fe _x C_1−x films were investigated by X-ray diffraction (XRD), atomic force microscope (AFM) and Raman spectroscopy. The results show that the iron and carbon of as-deposited films are in amorphous state, and the Fe _x C_1−x films are diamond-like carbon (DLC) films. After doping iron into the DLC films, a smooth surface morphology of the Fe _x C_1−x films has been obtained with the surface roughness Ra of about 0.231 nm for x=18at%. The Fe _x C_1−x films have good soft magnetic properties with the coercivity of approximately 20 Oe. A high positive magnetoresistance (MR) up to 93% with x=1at% was observed in a Fe _x C_1−x granular film at 300 K. The resistance characteristic of Fe-C films is changed at about 230 K and the positive MR effect can be understood by the p-n heterojunction theory.