Designing of a micromachined gyroscope system with a closed-loop DC biased interface ASIC

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• 作者：TingTing Tao ; WenGao Lu ; Ran Fang ; YaCong Zhang…
• 关键词：capacitance detection ; high voltage buffer ; MEMS gyroscope ; closed ; loop oscillation ; ASIC ; /li> ; ; ; ; 102403
• 刊名：SCIENCE CHINA Information Sciences
• 出版年：2014
• 出版时间：October 2014
• 年：2014
• 卷：57
• 期：10
• 页码：1-13
• 全文大小：3,136 KB
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• 作者单位：TingTing Tao (1)
  WenGao Lu (1)
  Ran Fang (1)
  YaCong Zhang (1)
  ZhongJian Chen (1)
  GuiZhen Yan (1)
  
  1. National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, China
  
• ISSN：1869-1919

文摘

In this paper, a micromachined gyroscope system composed of a vibratory gyroscope with its interface ASIC is presented. The system adopts a DC sensing method to detect the capacitive motion, which is insensitive to the mismatch of the gyroscope capacitors and can eliminate high frequency signals from the chip. Therefore it offers a commendable noise performance with simplified topology. Low noise design can be achieved by a continuous-time charge sensitive amplifier with the input-referred noise voltage of 9.833 nV/rtHz at 10 kHz. A novel high voltage (HV) buffer is adopted in the drive mode to strengthen its drive signal, so that the common-mode voltage of it is made at 5 V that is compatible with the gyroscope. The HV buffer utilizes two sets of power supply to achieve both good noise performance and HV output. The ASIC chip is fabricated in the 0.35 μm 2P4M BCD HV process, and is 2.5×2.0 mm2 in dimension. The test results prove that the system achieves a stable closed-loop oscillation in the drive mode. Furthermore, the in-phase demodulation result of the gyroscope system achieves a nonlinearity of 0.14% within the sense range of 0°-00°/s.