Positronics and nanotechnologies: Possibilities of studying nanoobjects in critical engineering materials using positron annihilation spectrometry
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- 作者：V. I. Grafutin ; E. P. Prokop¡¯ev ; S. P. Timoshenkov ; S. S. Evstaf¡¯ev and Yu. V. Funtikov
- 关键词：PACS 78.70.Bj
- 刊名：Russian Microelectronics
- 出版年：2009
- 出版时间：November, 2009
- 年：2009
- 卷：38
- 期：6
- 页码：418-428
- 全文大小：236.1 KB
文摘
It is shown that positron annihilation spectroscopy (PAS) is one of the efficient methods for determining the sizes of nanodefects (vacancies, vacancy clusters); free volumes of pores; cavities, and voids; their concentrations and the chemical composition at the annihilation site (location) in nanomaterials and other critical engineering materials. A brief review of experimental studies of nanodefects in porous silicon, silicon, and quartz monocrystal irradiated by protons as well as quartz powders are given.