Mass-produced polyethylene-terephthalate film coated with tantalum pentoxide for pH measurement under ISFET detection configuration
详细信息 查看全文
- 作者：Yung-Chen Wu ; Shang-Jing Wu ; Che-Hsin Lin
- 刊名：Microsystem Technologies
- 出版年：2017
- 出版时间：February 2017
- 年：2017
- 卷：23
- 期：2
- 页码：293-298
- 全文大小：
- 刊物类别：Engineering
- 刊物主题：Electronics and Microelectronics, Instrumentation; Nanotechnology; Mechanical Engineering;
- 出版者：Springer Berlin Heidelberg
- ISSN：1432-1858
- 卷排序：23
文摘
This study reports an ISFET-based pH sensor utilizing a tantalum pentoxide (Ta2O5) as the sensing layer. Commercial PET film for mass production of touch panel coated with Ta2O5 film is used as the extended gate electrode connecting to a MOSFET chip for H+ ion measurement. The low-cost and plug-and-sense PET sensing file makes the developed sensor is disposable. The high corrosion-resistance of Ta2O5 layer greatly extends the lifetime and the pH sensing range for the solid-state sensor. Theoretical Nernst response is adopted to evaluate the sensing performance of the developed pH sensor. Results show that the developed pH sensor exhibits high sensitivity of 24.18 mV/pH and good linearity of R2 = 0.9798 in the pH range from 1 to 13. In addition, the developed sensor also shows excellent sensing performance including ultra-fast response (<10 s), good repeatability (variation ~0.32 %) and good stability (variation <1 %). Moreover, the developed Ta2O5-based pH sensor shows low interference response to the existence of sodium and potassium interference ions. The developed solid state pH sensor provides a low-cost yet high performance way for developing disposable pH sensors.