Magnetic force-assisted electrolytic machining for polycrystalline silicon

详细信息    查看全文

• 作者：Kun Ling Wu ; Po Huai Yu
• 关键词：Electrolytic Machining (EM) ; Polysilicon ; Magnetic force ; Taguchi method
• 刊名：International Journal of Precision Engineering and Manufacturing
• 出版年：2015
• 出版时间：June 2015
• 年：2015
• 卷：16
• 期：7
• 页码：1391-1397
• 全文大小：943 KB
• 参考文献：1.Tonshoff, H. K., Karpuschewski, B., Hartmann, M., and Spengler, C., 鈥淕rinding-and-Slicing Technique as an Advanced Technology for Silicon Wafer Slicing,鈥?Machining Science and Technology, vol. 1, no. 1, pp. 33鈥?7, 1997.View Article
  2.Sreejith, P. S., Udupa, G., Noor, Y. B. M., and Ngoi, B. K. A., 鈥淩ecent Advances in Machining of Silicon Wafers for Semiconductor Applications,鈥?The International Journal of Advanced Manufacturing Technology, vol. 17, no. 3, pp. 157鈥?62, 2001.View Article
  3.Hardin, C. W., Qu, J., and Shih, A. J., 鈥淔ixed Abrasive Diamond Wire saw Slicing of Single-Crystal Silicon Carbide Wafers,鈥?Materials and Manufacturing Processes, vol. 19, no. 2, pp. 355鈥?67, 2004.View Article
  4.M枚ller, H. J., 鈥淲afering of Silicon Crystals,鈥?Physica Status Solidi (A), vol. 203, no. 4, pp. 659鈥?69, 2006.View Article
  5.Kung, K. Y. and Chiang, K. T., 鈥淢odeling and Analysis of Machinability Evaluation in the Wire Electrical Discharge Machining (WEDM) Process of Aluminum Oxide-based Ceramic,鈥?Materials and Manufacturing Processes, vol. 23, no. 3鈥?, pp. 241鈥?50, 2008.View Article
  6.Ali, M. Y. and Mohammad, A. S., 鈥淓xperimental Study of Conventional Wire Electrical Discharge Machining for Microfabrication,鈥?Materials and Manufacturing Processes, vol. 23, no. 7, pp. 641鈥?45, 2008.View Article
  7.Sarkar, S., Ghosh, K., Mitra, S., and Bhattacharyya, B., 鈥淎n Integrated approach to Optimization of WEDM Combining Single-Pass and Multipass Cutting Operation,鈥?Materials and Manufacturing Processes, vol. 25, no. 8, pp. 799鈥?07, 2010.View Article
  8.Peng, W. Y. and Liao, Y. S., 鈥淪tudy of Electrical Discharge Machining Technology for Slicing Silicon Ingots,鈥?Journal of Materials Processing Technology, vol. 140, no. 1, pp. 274鈥?79, 2003.View Article
  9.Takino, H., Ichinohe, T., Tanimoto, K., Yamaguchi, S., Nomura, K., and Kunieda, M., 鈥淐utting of Polished Single-Crystal Silicon by Wire Electrical Discharge Machining,鈥?Precision Engineering, vol. 28, no. 3, pp. 314鈥?19, 2004.View Article
  10.Bamberg, E. and Rakwal, D., 鈥淓xperimental Investigation of Wire Electrical Discharge Machining of Gallium-Doped Germanium,鈥?Journal of Materials Processing Technology, vol. 197, no. 1, pp. 419鈥?27, 2008.View Article
  11.Wang, W., Liu, Z. D., Tian, Z. J., Huang, Y. H., and Liu, Z. X., 鈥淗igh Efficiency Slicing of Low Resistance Silicon Ingot by Wire Electrolytic-Spark Hybrid Machining,鈥?Journal of Materials Processing Technology, vol. 209, no. 7, pp. 3149鈥?155, 2009.View Article
  12.Rakwal, D. and Bamberg, E., 鈥淪licing, Cleaning and Kerf Analysis Of Germanium Wafers Machined by Wire Electrical Discharge Machining,鈥?Journal of Materials Processing Technology, vol. 209, no. 8, pp. 3740鈥?751, 2009.View Article
  13.Tsui, H. P., Hung, J. C., You, J. C., and Yan, B. H., 鈥淚mprovement of Electrochemical Microdrilling Accuracy using Helical Tool,鈥?Materials and Manufacturing Processes, vol. 23, no. 5, pp. 499鈥?05, 2008.View Article
  14.Lee, E. S., 鈥淢achining Characteristics of the Electropolishing of Stainless Steel (STS316l),鈥?The International Journal of Advanced Manufacturing Technology, vol. 16, no. 8, pp. 591鈥?99, 2000.View Article
  15.Ramasawmy, H. and Blunt, L., 鈥?D Surface Characterisation of Electropolished EDMed Surface and Quantitative Assessment of Process Variables using Taguchi Methodology,鈥?International Journal of Machine Tools and Manufacture, vol. 42, no. 10, pp. 1129鈥?133, 2002.View Article
  16.Ramasawmy, H. and Blunt, L., 鈥淚nvestigation of the Effect of Electrochemical Polishing on EDM Surfaces,鈥?The International Journal of Advanced Manufacturing Technology, vol. 31, no. 11鈥?2, pp. 1135鈥?147, 2007.View Article
  17.Lin, C. C. and Hu, C. C., 鈥淓lectropolishing of 304 Stainless Steel: Surface Roughness Control using Experimental Design Strategies and a Summarized Electropolishing Model,鈥?Electrochimica Acta, vol. 53, no. 8, pp. 3356鈥?363, 2008.MathSciNet View Article
  18.Huang, C. A., Chen, Y. C., and Chang, J. H., 鈥淭he Electrochemical Polishing Behavior of the Inconel 718 Alloy in Perchloric-Acetic Mixed Acids,鈥?Corrosion Science, vol. 50, no. 2, pp. 480鈥?89, 2008.View Article
  19.Kim, J. D., Jin, D. X., and Choi, M. S., 鈥淪tudy on the Effect of a Magnetic Field on An Electrolytic Finishing Process,鈥?International Journal of Machine Tools and Manufacture, vol. 37, no. 4, pp. 401鈥?08, 1997.View Article
  20.Fang, J. C., Jin, Z. J., Xu, W. J., and Shi, Y. Y., 鈥淢agnetic Electrochemical Finishing Machining,鈥?Journal of Materials Processing Technology, vol. 129, no. 1, pp. 283鈥?87, 2002.View Article
  21.Kim, J. D. and Choi, M. S., 鈥淒evelopment of the Magneto-Electrolytic-Abrasive Polishing System (MEAPS) and Finishing Characteristics of a Cr-Coated Roller,鈥?International Journal of Machine Tools and Manufacture, vol. 37, no. 7, pp. 997鈥?006, 1997.View Article
  22.Hryniewicz, T., Rokicki, R., and Rokosz, K., 鈥淪urface Characterization of AISI 316l Biomaterials Obtained by Electropolishing in a Magnetic Field,鈥?Surface and Coatings Technology, vol. 202, no. 9, pp. 1668鈥?673, 2008.View Article
  23.Pa, P. S., 鈥淢agnetic Assistance in Cylinder-Surfaces Finish,鈥?Materials and Manufacturing Processes, vol. 24, no. 7鈥?, pp. 819鈥?23, 2009.View Article
  24.Pa, P. S., 鈥淎 Super Surface Finish Module by Simultaneous Influences from Electromagnetic Force and Ultrasonic Vibrations,鈥?Materials and Manufacturing Processes, vol. 25, no. 5, pp. 288鈥?92, 2010.View Article
  25.Burstein, G. T., Hutchings, I. M., and Sasaki, K., 鈥淓lectrochemically Induced Annealing of Stainless-Steel Surfaces,鈥?Nature, vol. 407, no. 6806, pp. 885鈥?87, 2000.View Article
  
• 作者单位：Kun Ling Wu (1)
  Po Huai Yu (2)
  
  1. Tungnan University, No.152, Sec. 3, Beishen Rd., Shenkeng Dist., New Taipei City, 22202, Taiwan
  2. National Central University, No. 300, Jhongda Rd., Jhongli City, Taoyuan County, 32001, Taiwan
  
• 刊物类别：Engineering
• 刊物主题：Industrial and Production Engineering
  Materials Science
  
• 出版者：Korean Society for Precision Engineering, in co-publication with Springer Verlag GmbH
• ISSN：2005-4602

文摘

This study aims at improving the surface quality of polycrystalline silicon (polysilicon) after wire electrical discharge machining (WEDM) by electrolytic machining (EM) assisted with magnetic force. The machining parameters are designed with an L18 orthogonal array according to the Taguchi method. The experiment data are then analyzed with the analysis of variance (ANOVA) to identify the effect of significant factors on the characteristics of magnetic force-assisted (MFA) EM. It is proved in this study that both the material removal and surface roughness achieved by MFA-EM are better than those obtained by standard EM. A group of significant factors and the optimum combinations of machining parameters are obtained from the ANOVA results. The contribution of adding magnetic force to EM is examined in this study to establish a composite EM technique with high efficiency and quality.