Analysis of the "Push–pull" Capacitance Bridge Circuit for Comb-Drive Micro-electro-mechanical Oscillators

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• 作者：P. Zheng ; W. G. Jiang ; C. S. Barquist ; Y. Lee…
• 关键词：Quantum fluids ; MEMS oscillators ; Measurement scheme ; Transduction factor
• 刊名：Journal of Low Temperature Physics
• 出版年：2016
• 出版时间：May 2016
• 年：2016
• 卷：183
• 期：3-4
• 页码：313-319
• 全文大小：1,457 KB
• 参考文献：1.M. González, P. Bhupathi, B.H. Moon, P. Zheng, G. Ling, E. Garcell, H.B. Chan, Y. Lee, J. Low Temp. Phys. 162, 661 (2011)ADS CrossRef
  2.M. González, P. Zheng, B.H. Moon, E. Garcell, Y. Lee, H.B. Chan, J. Low Temp. Phys. 171, 200 (2013)ADS CrossRef
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  7.M. González, P. Zheng, E. Garcell, Y. Lee, H.B. Chan, Rev. Sci. Instrum. 84, 025003 (2013)ADS CrossRef
  8.C.S. Barquist, J. Bauer, T. Edmonds, P. Zheng, W.G. Jiang, M. González, Y. Lee, H.B. Chan, J. Phys. 568, 032003 (2014)
  9.P. Zheng, W.G. Jiang, C.S. Barquist, H.B. Chan, Y. Lee, J. Phys. 568, 012030 (2014)
  10.M. Bao, Analysis and Design Principles of MEMS Devices (Elsevier, New York, 2005)
  
• 作者单位：P. Zheng (1)
  W. G. Jiang (1)
  C. S. Barquist (1)
  Y. Lee (1)
  H. B. Chan (2)
  
  1. Department of Physics, University of Florida, Gainesville, FL, 32603, USA
  2. Department of Physics, The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong
  
• 刊物类别：Physics and Astronomy
• 刊物主题：Physics
  Condensed Matter
  Characterization and Evaluation Materials
  Magnetism and Magnetic Materials
  
• 出版者：Springer Netherlands
• ISSN：1573-7357

文摘

We have developed an improved actuation/detection scheme for a comb-drive micro-electro-mechanical oscillator as a probe to study quantum fluids. This symmetric scheme has many advantages over the asymmetric scheme used previously. In this report, we provide a full description and analysis of the method so that researchers interested can readily implement the method in their experiments involving similar devices.