Depth profiling of oxygen in oxide films by 18O(p,α)15N nuclear reaction analysis
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- 作者：G. L. N. Reddy (1) <br> Pritty Rao (1) <br> J. V. Ramana (1) <br> S. Vikramkumar (1) <br> V. S. Raju (1) <br> Sanjiv Kumar (1) <br>
- 关键词：Oxygen ; Depth profiling ; Nuclear reaction analysis ; Resonance
- 刊名：Journal of Radioanalytical and Nuclear Chemistry
- 出版年：2012
- 出版时间：December 2012
- 年：2012
- 卷：294
- 期：3
- 页码：401-404
- 全文大小：227KB
- 参考文献：1. Pirovano MVG, Hofmann A, Sauer J (2007) Surf Sci Rep 62:219 CrossRef <br> 2. Cameron JR (1953) Phys Rev 90:839 v.90.839">CrossRef <br> 3. Leavitt JA, Stoss P, Cooper DB, Seerveld JL, McIntyre LC Jr, Davis RE, Gtierrez S, Reith TM (1986) Nucl Instr Meth B 66:296 CrossRef <br> 4. Watamori M, Shoji F, Oura K (1994) Jpn J Appl Phys 33:6039 CrossRef <br> 5. Lorenz-Wirzba H, Schmalbrock P, Trautvetter HP, Weischer M, Rolfs C, Rodney WS (1979) Nucl Phys A 313:346 CrossRef <br> 6. Amsel G, Samuel D (1967) Anal Chem 39:1689 CrossRef <br>
- 作者单位：G. L. N. Reddy (1) <br> Pritty Rao (1) <br> J. V. Ramana (1) <br> S. Vikramkumar (1) <br> V. S. Raju (1) <br> Sanjiv Kumar (1) <br><br>1. National Centre for Compositional Characterization of Materials, Bhabha Atomic Research Centre, ECIL Post, Hyderabad, 500062, India <br>
- ISSN：1588-2780
文摘
The paper describes the determination and depth profiling of oxygen in thin oxide films using 18O(p,α)15N nuclear reaction. The excitation function of 18O(p,α)15N nuclear reaction exhibits a resonance at 629?keV and a plateau at 730?keV with uniform cross-section. The resonance is used to determine the depth profile of oxygen in films while the plateau, to estimate its overall concentration. The resonance, characterized by a width of 2.1?keV enables high-depth resolution (~20?nm) measurements and has a probing depth of more than a micron. The paper presents depth profile measurements of oxygen in several metal oxide films (SiO2b>, TiO2b> and HfO2b>) using this resonance. Possible interferences arising from 15N(p,α)12C, 19F(p,α)16O and 11B(p,α)2α nuclear reactions are also discussed. It has been shown that it can serve as a suitable alternative to 3.05?MeV 16O(α,α)16O resonant scattering which is generally used for depth profiling oxygen. It is, in fact, more reliable and precise in materials that witness significant large angle multiple scattering. It can also be advantageously used to monitor 18O, when used as a tracer.