System design of Maxwell force driving fast tool servos based on model analysis

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• 作者：Y. H. Nie (1)
  F. Z. Fang (1)
  X. D. Zhang (1)
  
• 关键词：Fast tool servo ; Maxwell force ; Kinematic model ; Finite element analysis
• 刊名：The International Journal of Advanced Manufacturing Technology
• 出版年：2014
• 出版时间：April 2014
• 年：2014
• 卷：72
• 期：1-4
• 页码：25-32
• 全文大小：
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• 作者单位：Y. H. Nie (1)
  F. Z. Fang (1)
  X. D. Zhang (1)
  
  1. State Key Laboratory of Precision Measuring Technology & Instruments, Centre of Micro-Nano Manufacturing Technology, Tianjin University, Tianjin, China
  
• ISSN：1433-3015

文摘

A prototype of the Maxwell force driving fast tool servo (M-FTS) is designed and developed. The M-FTS is capable of accurately translating the cutting tool on a diamond turning machine. The FTS utilizes a flexure-based mechanism driven by Maxwell force to generate movements, a custom linear power amplifier to drive the armature, and a capacitance feedback system to measure accurate displacement. This paper describes the design of electromagnetic circuit, mechanical structures, and controller. The kinematic model of M-FTS is derived to instruct the designs; high-frequency electromagnetic finite element analysis is accomplished to assure the proper driving frequency ranges, and mechanical structure is analyzed to verify the proper displacement and stiffness of mechanical structure. Custom linear power amplifier with a bandwidth of 200?kHz is designed for the M-FTS. According to the experiment results, the frequency response of M-FTS system can be up to 100?kHz when it is open-loop driven. M-FTS has obtained a stroke of 35.5?μm with an open-loop driving. M-FTS can realize a stroke of 11.3?μm and frequency response of 3?kHz with the closed-loop control.