Fabrication of surface-patterned ZnO thin films using sol–gel methods and nanoimprint lithography

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• 作者：Shuxi Dai (1)
  Yang Wang (1)
  Dianbo Zhang (1)
  Xiao Han (1)
  Qing Shi (1)
  Shujie Wang (1)
  Zuliang Du (1) zld@henu.edu.cn
• 关键词：ZnO thin films – Surface pattern – Sol–gel methods – Nanoimprint lithography
• 刊名：Journal of Sol-Gel Science and Technology
• 出版年：2011
• 出版时间：October 2011
• 年：2011
• 卷：60
• 期：1
• 页码：17-22
• 全文大小：2.0 MB
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• 作者单位：1. Key Laboratory for Special Functional Materials of Ministry of Education, Henan University, Kaifeng, 475004 People’s Republic of China
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Chemistry
  Ceramics,Glass,Composites,Natural Materials
  Inorganic Chemistry
  Optical and Electronic Materials
  Nanotechnology
  
• 出版者：Springer Netherlands
• ISSN：1573-4846

文摘

Surface-patterned ZnO thin films were fabricated by direct imprinting on ZnO sol and subsequent annealing process. The polymer-based ZnO sols were deposited on various substrates for the nanoimprint lithography and converted to surface-patterned ZnO gel films during the thermal curing nanoimprint process. Finally, crystalline ZnO films were obtained by subsequent annealing of the patterned ZnO gel films. The optical characterization indicates that the surface patterning of ZnO thin films can lead to an enhanced transmittance. Large-scale ZnO thin films with different patterns can be fabricated by various easy-made ordered templates using this combination of sol–gel and nanoimprint lithography techniques.