Immobilization of enzyme and antibody on ALD-HfO2-EIS structure by NH3 plasma treatment
详细信息 查看全文
- 作者：I-Shun Wang (1)
Yi-Ting Lin (2)
Chi-Hsien Huang (2)
Tseng-Fu Lu (2)
Cheng-En Lue (2)
Polung Yang (3)
Dorota G Pijanswska (4)
Chia-Ming Yang (2)
Jer-Chyi Wang (2) (5)
Jau-Song Yu (3)
Yu-Sun Chang (3)
Chien Chou (1) (3)
Chao-Sung Lai (2) (3) (5) - 关键词：remote plasma ; silanization procedure ; surface functionalization
- 刊名：Nanoscale Research Letters
- 出版年：2012
- 出版时间：December 2012
- 年：2012
- 卷：7
- 期：1
- 全文大小：355KB
- 参考文献：1. Matsuo T, Wise KD: An integrated field-effect electrode for biopotential recording. / IEEE Trans Biomed Eng 1974, 21:485. CrossRef
2. Bousse L, Mostarshed S, van der Schoot B, de Rooij NF: Comparison of the hysteresis of Ta2O5 and Si3N4 pH-sensing insulators. / Sens Actuat B 1994, 17:157. CrossRef
3. Bobrov PV, Tarantov YA, Krause S, Moritz W: Chemical sensitivity of an ISFET with Ta2O5 membrane in strong acid and alkaline solutions. / Sens Actuat B 1991, 3:75. CrossRef
4. Kwon DH, Cho BW, Kim CS, Sohn BK: Effects of heat treatment on Ta2O5 sensing membrane for low drift and high sensitivity pH-ISFET. / Sens Actuat B 1996, 34:441. CrossRef
5. Ito Y: Long-term drift mechanism of Ta2O5 gate pH-ISFETs. / Sens Actuat B 2000, 64:152. CrossRef
6. Chou JC, Weng CY: Sensitivity and hysteresis effect in Al2O3 gate pH-ISFET. / Mater Chem Phys 2001, 71:120. CrossRef
7. Shin PK: The pH-sensing and light-induced drift properties of titanium dioxide thin films deposited by MOCVD. / Appl Surf Sci 2003, 214:214. CrossRef
8. Chou JC, Liao LP: Study on pH at the point of zero charge of TiO2 pH ion-sensitive field effect transistor made by the sputtering method. / Thin Solid Film 2005, 476:157. CrossRef
9. Lai CS, Yang CM, Lu TF: pH sensitivity improvement on 8 nm thick hafnium oxide by post deposition annealing. / Electrochem Solid-State Lett 2006, 9:G90. CrossRef
10. van der Wal PD, Briand D, Mondin G, Jenny S, Jeanneret S, Millon C, Roussel H, Dubourdieu C, de Rooij NF: High-k dielectrics for use as ISFET gate oxides. In / Proceedings of IEEE Sensors 2004: October 24鈥?7 2004; Vienna. IEEE; 2004:677.
11. Chou JC, Wang YF: Preparation and study on the drift and hysteresis properties of the tin oxide gate ISFET by the sol-gel method. / Sens Actuat B 2002, 86:58. CrossRef
12. Lai CS, Lu TF, Yang CM, Lin YC, Pijanowska DG, Jaroszewicz B: Body effect minimization using single layer structure for pH-ISFET applications. / Sens Actuat B 2010, 143:494. CrossRef
13. Shinwari MW, Deen MJ, Selvaganapathy PR: Finite-element modelling of biotransistors. / Nanoscale Res Lett 2010, 5:494. CrossRef
14. Caras S, Janata J: Field effect transistor sensitive to penicillin. / Anal Chem 1980, 52:1935. CrossRef
15. Pijanowska DG, Torbicz W: pH-ISFET based urea biosensor. / Sens Actuat B 1997, 44:370. CrossRef
16. Dzyadevich SV, Korpan YI, Arkhipova VN: Application of enzyme field-effect transistors for determination of glucose concentrations in blood serum. / Biosens Bioelectron 1999, 14:283. CrossRef
17. Soldatkin AP, Montoriol J, Sant W, Martelet C, Jaffrezic-Renault N: Creatinine sensitive biosensor based on ISFETs and creatinine deiminase immobilised in BSA membrane. / Talanta 2002, 58:351. CrossRef
18. Ruixin D, Xunling Y, Ke L, Ge B, Minghong W, Shouxin C, Bing Y: Effects of metal ions on conductivity and structure of single DNA molecule in different environmental conditions. / Nanoscale Res Lett 2010, 5:1431. CrossRef
19. Temple-Boyer P, Benyahia A, Sant W, Pourciel-Gouzy ML, Launay J, Martinez A: Modeling of urea-ENFETs for haemodialysis applications. / Sens Actuator B-Chem 2008, 131:525. CrossRef
20. Sun LP, Zhang Z, Wang S, Zhang J, Li H, Ren L, Weng J, Zhang QQ: Effect of pH on the interaction of gold nanoparticles with DNA and application in the detection of human p53 gene mutation. / Nanoscale Res Lett 2009, 4:216. CrossRef
21. Dhawan G, Sumana G, Malhotra BD: Recent developments in urea biosensors. / Biochem Eng J 2009, 44:42. CrossRef
22. Prakash O, Puliga S, Upadhyay LSB: Immobilization of watermelon ( Citrullus vulgaris ) urease in agarose gel for urea estimation. / Biotechnol Bioproc E 2007, 12:131. CrossRef
23. Lue CE, Yu TC, Yang CM, Pijanowska DG, Lai CS: Optimization of urea-EnFET based on Ta 2 O 5 layer with post annealing. / Sensors 2011, 11:4571. CrossRef
24. Lai CS, Yang CM, Lu TF: Thickness effects on pH response of HfO 2 sensing dielectric improved by rapid thermal annealing. / Jpn J Appl Phys 2006, 45:3807. CrossRef
25. Lu TF: ISFET with programmable structures and high-k sensing membranes for bio-applications. / PhD thesis. Chang Gung University, Electronic Engineering Department; 2011. - 作者单位：I-Shun Wang (1)
Yi-Ting Lin (2)
Chi-Hsien Huang (2)
Tseng-Fu Lu (2)
Cheng-En Lue (2)
Polung Yang (3)
Dorota G Pijanswska (4)
Chia-Ming Yang (2)
Jer-Chyi Wang (2) (5)
Jau-Song Yu (3)
Yu-Sun Chang (3)
Chien Chou (1) (3)
Chao-Sung Lai (2) (3) (5)
1. Institute of Electro-Optical Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan, 333, Taiwan
2. Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan, 333, Taiwan
3. Molecular Medicine Research Center, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan, 333, Taiwan
4. Nalecz Institute of Biocybernetics and Biomedical Engineering, Polish Academy of Sciences, Warsaw, 02-668, Poland
5. Biosensor Group, Biomedical Engineering Center, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan, 333, Taiwan - ISSN：1556-276X
文摘
Thin hafnium oxide layers deposited by an atomic layer deposition system were investigated as the sensing membrane of the electrolyte-insulator-semiconductor structure. Moreover, a post-remote NH3 plasma treatment was proposed to replace the complicated silanization procedure for enzyme immobilization. Compared to conventional methods using chemical procedures, remote NH3 plasma treatment reduces the processing steps and time. The results exhibited that urea and antigen can be successfully detected, which indicated that the immobilization process is correct.