Room-temperature and fast response hydrogen sensor based on annealed nanoporous palladium film

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• 作者：Mengmeng Hao ; Shuanghong Wu ; Han Zhou ; Wenbin Ye…
• 刊名：Journal of Materials Science
• 出版年：2016
• 出版时间：March 2016
• 年：2016
• 卷：51
• 期：5
• 页码：2420-2426
• 全文大小：1,442 KB
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• 作者单位：Mengmeng Hao (1)
  Shuanghong Wu (1)
  Han Zhou (1)
  Wenbin Ye (1)
  Xiongbang Wei (1)
  Xiangru Wang (1)
  Zhi Chen (1) (2)
  Shibin Li (1)
  
  1. School of Optoelectronic Information and State Key Laboratory of Electronic Thin Films & Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, China
  2. Department of Electrical & Computer Engineering and Center for Nanoscale Science & Engineering, University of Kentucky, Lexington, KY, 40506, USA
  
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Chemistry
  Materials Science
  Characterization and Evaluation Materials
  Polymer Sciences
  Continuum Mechanics and Mechanics of Materials
  Crystallography
  Mechanics
  
• 出版者：Springer Netherlands
• ISSN：1573-4803

文摘

Hydrogen sensor based on nanoporous palladium film with a short response time at room temperature has been investigated. Nanoporous palladium film was deposited on treated porous anodic aluminum oxide template by DC magnetron sputtering. We have researched the detection performance of the hydrogen sensor depending on different post-deposition annealing temperatures ranging from 150 to 400 °C. In this sensor, we obtained a sensor response time as short as 30 s at 1 % hydrogen concentration with an anneal temperature of 200 °C. The sensor exhibited good performance under hydrogen concentrations from 0.1 to 1 %.