Semiconductor nanomembranes for integrated silicon photonics and flexible Photonics

详细信息    查看全文

• 作者：Weidong Zhou (1)
  Zhenqiang Ma (2)
  Santhad Chuwongin (1)
  Yi-Chen Shuai (1)
  Jung-Hun Seo (2)
  Deyin Zhao (1)
  Hongjun Yang (1) (3)
  Weiquan Yang (1)
  
• 关键词：Photonic integration ; Photonic crystals ; Semiconductor nanomembranes ; Flexible photonics ; Silicon photonics
• 刊名：Optical and Quantum Electronics
• 出版年：2012
• 出版时间：October 2012
• 年：2012
• 卷：44
• 期：12-13
• 页码：605-611
• 全文大小：685KB
• 参考文献：1. Bowers J.E., Park H., Fang A.W., Cohen O., Jones R., Paniccia M.: Design and fabrication of optically pumped hybrid silicon-AlGaInAs evanescent lasers. IEEE J. Sel. Top. Quant. Electron. 12(2), 1657鈥?663 (2006)
  2. Kim D., Ahn J., Choi W., Kim H., Kim T., Song J., Huang Y., Liu Z., Lu C., Rogers J.: Stretchable and foldable silicon integrated circuits. Science 320(5875), 507鈥?11 (2008a) CrossRef
  3. Kim D., Song J., Choi W., Kim H., Kim R., Liu Z., Huang Y., Hwang K., Zhang Y., Rogers J.: Materials and noncoplanar mesh designs for integrated circuits with linear elastic responses to extreme mechanical deformations. Proc. Natl. Acad. Sci. USA 105(48), 18675鈥?8680 (2008b) CrossRef
  4. Mack S., Meitl M.A., Baca A.J., Zhu Z.T., Rogers J.A.: Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers. Appl. Phys. Lett. 88, 213101 (2006) CrossRef
  5. Meitl M.A., Zhu Z.T., Kumar V., Lee K.J., Feng X., Huang Y.Y., Adesida I., Nuzzo R.G., Rogers J.A.: Transfer printing by kinetic control of adhesion to an elastomeric stamp. Nat. Mater. 5(1), 33鈥?8 (2006) mat1532">CrossRef
  6. Park H., Fang A., Kodama S., Bowers J.: Hybrid silicon evanescent laser fabricated with a silicon waveguide and III-V offset quantum wells. Opt. Express 13(23), 9460鈥?464 (2005) CrossRef
  7. Qiang Z., Yang H., Chen L., Pang H., Ma Z., Zhou W.: Fano filters based on transferred silicon nanomembranes on plastic substrates. Appl. Phys. Lett. 93, 061106 (2008) CrossRef
  8. Roberts M.M., Klein L.J., Savage D.E., Slinker K.A., Friesen M., Celler G., Eriksson M.A., Lagally M.G.: Elastically relaxed free-standing strained-silicon nanomembranes. Nat. Mater. 5(5), 388鈥?93 (2006) mat1606">CrossRef
  9. Rogers J., Bao Z., Baldwin K., Dodabalapur A., Crone B., Raju V., Kuck V., Katz H., Amundson K., Ewing J.: Paper-like electronic displays: large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks. Proc. Natl. Acad. Sci. USA 98(9), 4835鈥?840 (2001) CrossRef
  10. Rogers J., Huang Y.: A curvy, stretchy future for electronics. Proc. Natl. Acad. Sci. USA 106(27), 10875鈥?0876 (2009) CrossRef
  11. Schmidt O.G., Eberl K.: Nanotechnology: thin solid films roll up into nanotubes. Nature 410(6825), 168 (2001) CrossRef
  12. Scott S.A., Lagally M.G.: Elastically strain-sharing nanomembranes: flexible and transferable strained silicon and silicon鈥揼ermanium alloys. J. Phy. D Appl. Phys 40(4), R75鈥揜92 (2007) CrossRef
  13. Sun Y., Rogers J.A.: Inorganic semiconductors for flexible electronics. Adv. Mater. 19, 1897鈥?916 (2007) ma.200602223">CrossRef
  14. Yang H., Chuwongin S., Qiang Z., Chen L., Pang H., Ma Z., Zhou W.: Resonance control of membrane reflectors with effective index engineering. Appl. Phys. Lett. 95, 023110 (2009) CrossRef
  15. Yang H., Qiang Z., Pang H., Ma Z., Zhou W.D.: Surface-normal fano filters based on transferred silicon nanomembranes on glass substrates. Electron. Lett. 44(14), 858鈥?59 (2008) CrossRef
  16. Yang W., Yang H., Qin G., Ma Z., Berggren J., Hammar M., Soref R., Zhou W.: Large-area InP-based crystalline nanomembrane flexible photodetectors. Appl. Phys. Lett. 96(12), 121107 (2010) CrossRef
  17. Yuan H.-C., Shin J., Qin G., Sun L., Bhattacharya P., Lagally M.G., Celler G.K., Ma Z.: Flexible photodetectors on plastic substrates by use of printing transferred single-crystal germanium membranes. Appl. Phys. Lett. 94(1), 013102 (2009) CrossRef
  18. Yuan H.C., Celler G.K., Ma Z.: 7.8-GHz flexible thin-film transistors on a low-temperature plastic substrate. J. Appl. Phys. 102, 034501 (2007) CrossRef
  19. Yuan H.C., Ma Z.: Microwave thin-film transistors using Si nanomembranes on flexible polymer substrate. Appl. Phys. Lett. 89, 212105 (2006) CrossRef
  20. Yuan H.C., Ma Z., Roberts M.M., Savage D.E., Lagally M.G.: High-speed strained-single-crystal-silicon thin-film transistors on flexible polymers. J. Appl. Phys. 100, 013708 (2006) CrossRef
  21. Yuan, H.C., Roberts, M.M., Zhang, P., Park, B.N., Klein, L.J., Savage, D.E., Flack, F.S., Ma, Z., Evans, P.G., Eriksson, M.A.: Silicon-based nanomembrane materials: the ultimate in strain engineering. In: Digest of Papers 2005 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, pp. 327鈥?33. (2005)
  22. Zhang P., Tevaarwerk E., Park B., Savage D., Celler G., Knezevic I., Evans P., Eriksson M., Lagally M.: Electronic transport in nanometre-scale silicon-on-insulator membranes. Nature 439(7077), 703鈥?06 (2006) CrossRef
  23. Zhou, W., Ma, Z.: Semiconductor nanomembranes for stacked and flexible photonics (Invited). Paper presented at the Photonics West, San Jose (2010)
  24. Zhou W., Ma Z., Yang H., Qiang Z., Qin G., Pang H., Chen L., Yang W., Chuwongin S., Zhao D.: Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes. J. Phys. D 42(23), 234007鈥?34017 (2009) CrossRef
  
• 作者单位：Weidong Zhou (1)
  Zhenqiang Ma (2)
  Santhad Chuwongin (1)
  Yi-Chen Shuai (1)
  Jung-Hun Seo (2)
  Deyin Zhao (1)
  Hongjun Yang (1) (3)
  Weiquan Yang (1)
  
  1. Department of Electrical Engineering, NanoFAB Center, University of Texas at Arlington, Arlington, TX, 76019, USA
  2. Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, WI, 53706, USA
  3. Semerane Inc., Arlington, TX, 76010, USA
  
• ISSN：1572-817X

文摘

Crystalline semiconductor nanomembranes (NMs), which are transferable, stackable, bondable and manufacturable, offer unprecedented opportunities for unique and novel device applications. We review here nanophotonic devices based on stacked semiconductor NMs on Si, glass and flexible PET substrates. Photonic crystal Fano resonance-based surface-normal optical filters and broadband reflectors have been demonstrated with unique angle and polarization properties. Flexible photodetectors and solar cells have also been developed based on the NM stacking processes. Such NM stacking process can lead to a paradigm shift on silicon photonic integration and hybrid organic/inorganic flexible photonics.