Structural and optical properties of Fe-doped hydrogenated amorphous carbon films prepared from trans-2-butene by plasma enhanced metal organic chemical vapor deposition

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• 作者：Hongliang Zhang ; Weidong Wu ; Chengshi Gong ; Wei Wang ; Zhibing He ; Jun Li ; Xin Ju ; Yongjian Tang and Erqing Xie
• 关键词：PACS 68.55.Ln ; 73.20.Hb ; 81.15.Gh ; 73.20.Hb ; 61.80. ; x
• 刊名：Applied Physics A: Materials Science & Processing
• 出版年：2010
• 出版时间：March, 2010
• 年：2010
• 卷：98
• 期：4
• 页码：895-900
• 全文大小：516.0 KB

文摘

Fe-doped hydrogenated amorphous carbon (a-C:H:Fe) films were deposited from a gas mixture of trans-2-butene/ferrocene/H₂ by plasma enhanced metal organic chemical vapor deposition. X-ray photoelectron spectroscopy, Fourier transform infrared spectra and Raman spectra were used to characterize the composition and the bonding structure of the a-C:H:Fe and a-C:H films. Optical properties were investigated by the UV–visible spectroscopy and the photoluminescence (PL) spectra. The Fe-doped films contain more aromatic structures and C=C bonds than the undoped films. The sp 2 carbon content and sp 2 clustering of the films increase, and aromatic-like rings’ structures become richer after Fe-doping. The Tauc optical gap of the a-C:H:Fe films become narrower by 0.3 eV relative to the value of the a-C:H films. The PL peak shifts from 2.35 eV of the a-C:H films to 1.95 eV of the a-C:H:Fe films, and the PL intensity of the a-C:H:Fe films is greatly enhanced. A deep level emission peak around 2.04 eV of the a-C:H:Fe films is observed.