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High performance of graphene oxide-doped silicon oxide-based resistance random access memory
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  • 作者:Rui Zhang (10)
    Kuan-Chang Chang (11)
    Ting-Chang Chang (12) (13)
    Tsung-Ming Tsai (11)
    Kai-Huang Chen (14)
    Jen-Chung Lou (10)
    Jung-Hui Chen (15)
    Tai-Fa Young (16)
    Chih-Cheng Shih (11)
    Ya-Liang Yang (11) (16)
    Yin-Chih Pan (11)
    Tian-Jian Chu (11)
    Syuan-Yong Huang (11)
    Chih-Hung Pan (11)
    Yu-Ting Su (12)
    Yong-En Syu (12)
    Simon M Sze (17)
  • 关键词:High performance ; Graphene oxide ; RRAM ; Hopping conduction
  • 刊名:Nanoscale Research Letters
  • 出版年:2013
  • 出版时间:December 2013
  • 年:2013
  • 卷:8
  • 期:1
  • 全文大小:483 KB
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  • 作者单位:Rui Zhang (10)
    Kuan-Chang Chang (11)
    Ting-Chang Chang (12) (13)
    Tsung-Ming Tsai (11)
    Kai-Huang Chen (14)
    Jen-Chung Lou (10)
    Jung-Hui Chen (15)
    Tai-Fa Young (16)
    Chih-Cheng Shih (11)
    Ya-Liang Yang (11) (16)
    Yin-Chih Pan (11)
    Tian-Jian Chu (11)
    Syuan-Yong Huang (11)
    Chih-Hung Pan (11)
    Yu-Ting Su (12)
    Yong-En Syu (12)
    Simon M Sze (17)

    10. School of Software and Microelectronics, Peking University, Beijing, 100871, People鈥檚 Republic of China
    11. Department of Materials and Optoelectronic Science, National Sun Yat-Sen University, Kaohsiung, 804, Taiwan
    12. Department of Physics, National Sun Yat-Sen University, Kaohsiung, 804, Taiwan
    13. Advanced Optoelectronics Technology Center, National Cheng Kung University, Tainan, 700, Taiwan
    14. Department of Electronic Engineering and Computer Science, Tung-Fang Design Institute, Kaohsiung, Taiwan
    15. Department of Chemistry, National Kaohsiung Normal University, Kaohsiung, Taiwan
    16. Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan
    17. Department of Electronics Engineering, National Chiao Tung University, Hsinchu, Taiwan
  • ISSN:1556-276X
文摘
In this letter, a double active layer (Zr:SiO x /C:SiO x ) resistive switching memory device with outstanding performance is presented. Through current fitting, hopping conduction mechanism is found in both high-resistance state (HRS) and low-resistance state (LRS) of double active layer RRAM devices. By analyzing Raman and FTIR spectra, we observed that graphene oxide exists in C:SiO x layer. Compared with single Zr:SiO x layer structure, Zr:SiO x /C:SiO x structure has superior performance, including low operating current, improved uniformity in both set and reset processes, and satisfactory endurance characteristics, all of which are attributed to the double-layer structure and the existence of graphene oxide flakes formed by the sputter process.

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