基于高通量筛选的高性能NO_x气敏材料研究
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摘要
以SnO_2,BaTiO_3,ZnO为原材料设计一组材料体系,利用气敏膜并行合成仪并行制备45种气敏膜,通过高通量气敏性能无人测试仪表征气敏性能,筛选出对氮氧化物(NO_x)气体敏感性、选择性较好的材料。通过对NO,NO_2,苯、甲醛、CO、乙醇气体的气敏性能测试,发现当SnO_2和BaTiO_3按摩尔比6∶2复合时,在200℃时对500×10~(-9)NO,500×10~(-9)NO_2响应值分别有142,113.4,且具有较好的选择性。最后,对SnO_2—BaTiO_3复合材料如何提升传感器性能进行了讨论。
To sift the materials of favorable sensitivity and selectivity to nitric oxide(NO_x),SnO_2、BaTiO_3 and ZnO are used to design a group of material system.The total of 45 gas sensor films are prepared by gas-sensitive membrane parallel synthesis platform and the properties of gas sensor are measured by high-throughput gassensitive unmanned test platform.It can be concluded that the composite material of SnO_2∶BaTiO_3=6∶2 has the best response value through testing NO,NO_2,benzene,methanal,CO,ethanol.The measured sensitivity values toward 500×10~(-9)NO,500×10~(-9)NO_2 are 142 and 113.4 respectively at the optimum operating temperature of 200℃.Meanwhile,the gas sensor film has the selectivity to above-mentioned gas.The principle of utilizing composite material to improve gas-sensitive property is discussed.
To sift the materials of favorable sensitivity and selectivity to nitric oxide(NO_x),SnO_2、BaTiO_3 and ZnO are used to design a group of material system.The total of 45 gas sensor films are prepared by gas-sensitive membrane parallel synthesis platform and the properties of gas sensor are measured by high-throughput gassensitive unmanned test platform.It can be concluded that the composite material of SnO_2∶BaTiO_3=6∶2 has the best response value through testing NO,NO_2,benzene,methanal,CO,ethanol.The measured sensitivity values toward 500×10~(-9)NO,500×10~(-9)NO_2 are 142 and 113.4 respectively at the optimum operating temperature of 200℃.Meanwhile,the gas sensor film has the selectivity to above-mentioned gas.The principle of utilizing composite material to improve gas-sensitive property is discussed.
引文
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[2]WANG C X,YIN L W,ZHANG L Y,et al.Metal oxide gas sensors:Sensitivity and influencing factors[J].Sensors,2010,10:2088-2106.
[3]MILLER D,AKBAR S,MORRIS P.Nanoscale metal oxide-based heterojunctions for gas sensing:A review[J].Sensors and Actuators B:Chemical,2014,204:250-272.
[4]SHAPOSHNIK D,PAVELKO R,LLOBET E,et al.Hydrogen sensors on the basis of SnO2-Ti O2systems[J].Sensors and Actuators B:Chemical,2012,174(1):527-534.
[5]KANETI Y,MORICEAU J,LIU M,et al.Hydrothermal synthesis of ternaryα-Fe2O3-Zn O-Au nanocomposites with high gas-sensing performance[J].Sensors and Actuators B:Chemical,2015,209:889-897.
[6]FRANCIOSO L,FORLEO A,CAPONE S,et al.Nanostructured In2O3-SnO2sol-gel thin film as material for NO2detection[J].Sensors and Actuators B:Chemical,2006,114(2):646-655.
[7]POTYRAILO R A,MIRSKY V M.Combinatorial and high-throughput development of sensing materials:The first 10 years[J].Chemical Reviews,2008,39(19):770-813.
[8]DANG D,SAKAI G,SHIMANOE K,et al.Preparation of grain size-controlled tin oxide sols by hydrothermal treatment for thin film sensor application[J].Sensors and Actuators B:Chemical,2016,103(1):386-391.
[9]ZHAO J W,XIE C S,YANG L,et al.Enhanced gas sensing performance of Li-doped Zn O nanoparticle film by the synergistic effect of oxygen interstitials and oxygen vacancies[J].Applied Surface Science,2015,330:126-133.
[10]刘阳,李勃,姚有为,等.改善SnO2气体传感器气敏性能的研究进展[J].传感器与微系统,2012,31(12):5-8.
[11]BARSAN N,WEIMAR U.Conduction model of metal oxide gas sensors[J].Journal of Electroceramics,2001,7(3):143-167.
[12]刘恩科,朱秉升,罗晋生.半导体物理学[M].北京:电子工业出版社,2008.
[13]XUE N Z,ZHANG Q Y,ZHANG S P,et al.Highly sensitive and selective hydrogen gas sensor using the mesoporous SnO2modified layers[J].Sensors,2017,17(10):23-51.
[14]GURLO A,RIEDEL R.In-situ and operando spectroscopy for assessing mechanisms of gas sensing[J].Angewandte Chemie:International Edition,2007,46(21):3826-3848.
[15]EPIFANI M,PRADES J,COMINI E,et al.The role of surface oxygen vacancies in the NO2sensing properties of Sn O2nanocrystals[J].Journal of Physical Chemistry C,2008,112(49):19540-19546.
[16]HUO L P,YANG X,LIU Z W,et al.Modulation of potential barrier heights in Co3O4/SnO2heterojunctions for highly H2-selective sensors[J].Sensors and Actuators B:Chemical,2017,244:694-700.