基片集成波导式高温压力传感器的制备与测试
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摘要
提出了一种新的无线无源高温压力传感器结构,该传感器的结构主要由含有内置空腔的基片集成圆波导(SICW)谐振器和集成于波导上金属面的缝隙天线两部分组成。共面波导天线(CPW)发出的频率电磁信号通过缝隙天线耦合到传感器内部,并经由缝隙天线反馈到共面波导天线。当外部压力作用于传感器的空腔上表面时,传感器的有效介电常数发生变化,从而导致传感器的谐振频率发生变化。传感器的试样通过高温共烧陶瓷(HTCC)微组装工艺与丝网印刷技术相结合进行制备。实验过程中,共面波导天线与网络分析仪进行连接,通过网络分析仪对天线的S11参数进行测试,进而可以从频率曲线中对传感器的谐振频率进行提取。通过对制备的传感器进行不同温度下的压力测试,发现提出的压力传感器在800℃高温下仍然可以正常工作,在800℃时传感器的测试灵敏度为0.124 5 MHz/kPa。
A new wireless passive high temperature pressure sensor structure was proposed.It was mainly composed of a substrate integrated circular waveguide(SICW)resonator with a builtin cavity and a slot antenna integrated on the metal surface of the waveguide.The frequency electromagnetic signals from the coplanar waveguide antenna(CPW)coupled to the inside of the sensor and fed back to the coplanar waveguide antenna through the slot antenna.When the external pressure applied on the upper surface of the sensor cavity,the effective dielectric constant of the sensor changed,leading to the change of the resonant frequency of the sensor.The sample of the sensor was prepared by the high-temperature co-fired ceramics(HTCC)micro-assembly process and the screen printing technique.During the experiment,the CPW antenna was connected with the network analyzer,and the S11 parameter of the antenna was tested by the network analyzer,then the resonant frequency of the sensor was extracted from the frequency curves.The pressure sensor was tested at different temperatures.It is found that the proposed pressure sensor can work well at the high temperature of 800 ℃,and the test sensitivity of the sensor is0.124 5 MHz/kPa at 800 ℃.
A new wireless passive high temperature pressure sensor structure was proposed.It was mainly composed of a substrate integrated circular waveguide(SICW)resonator with a builtin cavity and a slot antenna integrated on the metal surface of the waveguide.The frequency electromagnetic signals from the coplanar waveguide antenna(CPW)coupled to the inside of the sensor and fed back to the coplanar waveguide antenna through the slot antenna.When the external pressure applied on the upper surface of the sensor cavity,the effective dielectric constant of the sensor changed,leading to the change of the resonant frequency of the sensor.The sample of the sensor was prepared by the high-temperature co-fired ceramics(HTCC)micro-assembly process and the screen printing technique.During the experiment,the CPW antenna was connected with the network analyzer,and the S11 parameter of the antenna was tested by the network analyzer,then the resonant frequency of the sensor was extracted from the frequency curves.The pressure sensor was tested at different temperatures.It is found that the proposed pressure sensor can work well at the high temperature of 800 ℃,and the test sensitivity of the sensor is0.124 5 MHz/kPa at 800 ℃.
引文
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[4]何洪涛,王伟忠,杜少博,等.一种新型MEMS压阻式SiC高温压力传感器[J].微纳电子技术,2015,52(4):233-239.
[5]陈勇,郭方方,白晓弘,等.基于SOI技术高温压力传感器的研制[J].仪表技术与传感器,2014(6):4-6.
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[9]吴波.小型化基片集成波导背腔缝隙天线研究[D].成都:电子科技大学,2014.
[10]DESLANDES D,WU K.Single-substrate integration technique of planar circuits and waveguide filters[J].IEEETransactions on Microwave Theory and Techniques,2003,51(2):593-596.
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[12]钟催林.基于基片集成波导的微波电路研究[D].成都:电子科技大学,2009.
[13]KOMULAINEN M,MHNEN J,TICK T,et al.Embedded air cavity backed microstrip antenna on an LTCC substrate[J].Journal of the European Ceramic Society,2007,27(8):2881-2885.